• All sections
  • H - Electricity
  • H01L - Semiconductor devices not covered by class
  • H01L 21/68 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for positioning, orientation or alignment

Patent holdings for IPC class H01L 21/68

Total number of patents in this class: 3208

10-year publication summary

164
177
248
285
311
321
288
279
227
85
2015 2016 2017 2018 2019 2020 2021 2022 2023 2024

Principal owners for this class

Owner
All patents
This class
Applied Materials, Inc.
16587
205
Tokyo Electron Limited
11599
193
Nikon Corporation
7162
185
Taiwan Semiconductor Manufacturing Company, Ltd.
36809
139
Lam Research Corporation
4775
89
Samsung Electronics Co., Ltd.
131630
60
EV Group E. Thallner GmbH
376
51
Disco Corporation
1745
49
ASML Netherlands B.V.
6816
48
Screen Holdings Co., Ltd.
2431
48
Rohinni, LLC
89
34
Samsung Display Co., Ltd.
30585
33
Brooks Automation US, LLC
348
33
Boe Technology Group Co., Ltd.
35384
31
Shanghai Micro Electronics Equipment (Group) Co., Ltd.
243
30
Semes Co., Ltd.
1119
29
KLA Corporation
1223
28
Kawasaki Heavy Industries, Limited
1524
27
Canon Inc.
36841
25
Changxin Memory Technologies, Inc.
4732
23
Other owners 1848